Low Temperature Deposited BST Thin Films for RF MEMS Switch

Author： Laishram Radhapiyari   Thakur O. P.   Bhattacharya D. K.   Goyal Anshu   Sharma Renu   Singh Jagbir   Pal Ramjay  

Publisher： Taylor & Francis Ltd

ISSN： 1058-4587

Source： Integrated Ferroelectrics, Vol.116, Iss.1, 2010-01, pp. : 35-40

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