Study of a Novel MEMS Accelerometer with Low Noise Reduced by Actuators

Author： Dong Linxi   Cui Yingying   Huo Weihong   Yan Haixia   Sun Lingling  

Publisher： Taylor & Francis Ltd

ISSN： 1058-4587

Source： Integrated Ferroelectrics, Vol.145, Iss.1, 2013-01, pp. : 68-79

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