Scalable, MEMS-enabled, vibrational tactile actuators for high resolution tactile displays

E-ISSN： 1361-6439|24|12|125014-125024

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.24, Iss.12, 2014-12, pp. : 125014-125024

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