Etching Mechanism of Ferroelectric Film Etched by Helicon Plasma Method

Author: You In-Kyu   Yoon Sung-Min   Cho Seong Mok   Kim Kwi Dong   Ryu Sang-Ouk   Lee Nam Yeal   Yu Byoung-Gon   Koo Jin Gun   Kim Jong Dae  

Publisher: Taylor & Francis Ltd

ISSN: 1058-4587

Source: Integrated Ferroelectrics, Vol.48, Iss.1, 2002-01, pp. : 213-220

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