Fabrication and Properties of Silicon-Based PLZT Thin Films for MFSFET Applications

Author： SHAO TIAN-QI REN TIAN-LING LIU LI-TIAN ZHU JUN LI ZHI-JIAN

ISSN： 1058-4587

Source： Integrated Ferroelectrics, Vol.61, Iss.1, 2004-01, pp. : 189-195

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