Preparations of PZT Thin Film Capacitors on PtRhO x Electrodes With Various Conducting Barriers for High Density Ferroelectric Memories

Author： LEE KWANG LEE KYUNG

Publisher： Taylor & Francis Ltd

ISSN： 1058-4587

Source： Integrated Ferroelectrics, Vol.64, Iss.1, 2004-01, pp. : 305-316

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