DESIGN AND OPTIMIZATION OF MICRO SCANNER DRIVEN BY FOLDED PIEZOELECTRIC UNIMORPH ACTUATORS USING PZT FILMS

Author： FANG HUAJUN   LIU LITIAN   WU XIAOMING   ZHANG NINGXIN   REN TIANLING  

Publisher： Taylor & Francis Ltd

ISSN： 1058-4587

Source： Integrated Ferroelectrics, Vol.76, Iss.1, 2005-11, pp. : 23-30

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