THE LATEST ADVANCES IN HIGH-DIELECTRIC THIN-FILM CAPACITOR TECHNOLOGY FOR GHz-RF DEVICES

Author： SUZUKI TOSHIMASA MORITO KENTARO IWAZAKI YOSHIKI

ISSN： 1058-4587

Source： Integrated Ferroelectrics, Vol.76, Iss.1, 2005-11, pp. : 47-57

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