PREPARATION AND PIEZOELECTRIC PROPERTIES OF SOL-GEL-DERIVED NB-DOPED PZT FILMS FOR MEMS APPLICATIONS

Author： KWOK K.   KWOK K.   TSANG R. C.   CHAN H. L.   CHOY C.  

Publisher： Taylor & Francis Ltd

ISSN： 1058-4587

Source： Integrated Ferroelectrics, Vol.80, Iss.1, 2006-11, pp. : 155-162

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