MICROMACHINED PIEZOELECTRIC POLYMER MEMBRANE ACOUSTIC SENSOR

By LAM T.   LAM K.   CHAN H.  

Integrated Ferroelectrics, Vol. 76, Iss. 1, 2005-11 ,pp. : 31-37

Taylor & Francis Ltd

Access to resources Recommend Favorite

Edge-released, piezoelectric MEMS acoustic transducers in array configuration

By Chen Shih-Jui   Choe Youngki   Baumgartel Lukas   Lin Anderson    

Journal of Micromechanics and Microengineering, Vol. 22, Iss. 2, 2012-02 ,pp. : 25005-25013

IOP Publishing

Access to resources Recommend Favorite

Design, fabrication and characterization of a piezoelectric MEMS diaphragm resonator mass sensor

By Hu Zhongxu   Hedley John   Keegan Neil   Spoors Julia   Waugh William   Gallacher Barry   Boillot François-Xavier   Collet Joël   McNeil Calum  

Journal of Micromechanics and Microengineering, Vol. 23, Iss. 12, 2013-12 ,pp. : 125019-125032

IOP Publishing

Access to resources Recommend Favorite

Optimization of piezoelectric bimorph actuators with active damping for static and dynamic loads

By Donoso A.  

Structural and Multidisciplinary Optimization, Vol. 38, Iss. 2, 2009-04 ,pp. : 171-183

Springer Publishing Company

Access to resources Recommend Favorite

DESIGN OF A NOVEL PIEZOELECTRIC ACOUSTIC SENSOR USING SURFACE MICROMACHINING

By YANG YI   REN TIAN-LING   LIU LI-TIAN  

Integrated Ferroelectrics, Vol. 80, Iss. 1, 2006-11 ,pp. : 363-372

Taylor & Francis Ltd

Access to resources Recommend Favorite