Edge-released, piezoelectric MEMS acoustic transducers in array configuration

Author: Chen Shih-Jui   Choe Youngki   Baumgartel Lukas   Lin Anderson    

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.22, Iss.2, 2012-02, pp. : 25005-25013

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