LOW TEMPERATURE DEPOSITION OF Pb(Zr,Ti)O 3 THIN FILMS BY LIQUID DELIVERY MOCVD USING A COCKTAIL SOURCE WITH Pb(DMAMP) 2 , Zr(MMP) 4 AND Ti(MMP) 4

Author: OTANI YOHEI   UCHIYAMA KIYOSHI   OKAMURA SOICHIRO   SHIOSAKI TADASHI  

Publisher: Taylor & Francis Ltd

ISSN: 1058-4587

Source: Integrated Ferroelectrics, Vol.81, Iss.1, 2006-11, pp. : 261-270

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