A ZnO thin-film driven microcantilever for nanoscale actuation and sensing

Author： Yuan Yanhui Shyong Chow Kun Du Hejun Wang Peihong Zhang Mingsheng Yu Shengkai Liu Bo

ISSN： 1947-5411

Source： International Journal of Smart and Nano Materials, Vol.4, Iss.2, 2013-06, pp. : 128-141

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