Wafer scale tilt-compensated silicon nanowire atomic force microscopy probes for high aspect ratio geometries

Author: Bryce Brian A   Ilic B Robert   Reuter Mark C   Tiwari Sandip  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.9, 2014-09, pp. : 95016-95022

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