Oxygen-induced graphitization of amorphous carbon deposit on ohmic switch contacts improves their electrical conductivity and protects them from wear

Author: Brand Vitali   de Boer Maarten P  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.9, 2014-09, pp. : 95029-95037

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