Polymeric microlens array fabricated with PDMS mold-based hot embossing

Author: Liu Yongshun   Zhang Ping   Deng Yongbo   Hao Peng   Fan Jianhua   Chi Mingbo   Wu Yihui  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.9, 2014-09, pp. : 95028-95035

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