A gimbal-less two-axis electrostatic scanner with tilted stationary vertical combs and serially connected springs via a microassembly process

Author: Jun Min-Ho   Moon Seunghwan   Lee Byeong Ha   Lee Jong-Hyun  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.9, 2014-09, pp. : 95008-95018

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