Design, development and characterization of an x-band 5 bit DMTL phase shifter using an inline MEMS bridge and MAM capacitors

Author: Dey Sukomal   Koul Shiban K  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.9, 2014-09, pp. : 95007-95021

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