Mechanical behavior analysis on electrostatically actuated rectangular microplates

Author： Li Zhikang   Zhao Libo   Jiang Zhuangde   Ye Zhiying   Dai Lu   Zhao Yulong  

Publisher： IOP Publishing

E-ISSN： 1361-6439|25|3|35007-35018

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.3, 2015-03, pp. : 35007-35018

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