Size-dependent pull-in instability of electrostatically actuated microbeam-based MEMS

Author： Wang Binglei   Zhou Shenjie   Zhao Junfeng   Chen Xi  

Publisher： IOP Publishing

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.21, Iss.2, 2011-02, pp. : 27001-27006

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