Wafer–to–wafer transfer process of barium strontium titanate for frequency tuning applications using laser pre-irradiation

Author： Samoto Tetuo   Hirano Hideki   Somekawa Toshihiro   Hikichi Kousuke   Fujita Masayuki   Esashi Masayoshi   Tanaka Shuji  

Publisher： IOP Publishing

E-ISSN： 1361-6439|25|3|35015-35022

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.3, 2015-03, pp. : 35015-35022

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