A Ku band 5 bit MEMS phase shifter for active electronically steerable phased array applications

Author： Sharma Anesh K   Gautam Ashu K   Farinelli Paola   Dutta Asudeb   Singh S G  

Publisher： IOP Publishing

E-ISSN： 1361-6439|25|3|35014-35025

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.3, 2015-03, pp. : 35014-35025

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