Effect of helium implantation on SiC and graphite

Author: Hong-Yan Guo   Chang-Chun Ge   Min Xia   Li-Ping Guo   Ji-Hong Chen   Qing-Zhi Yan  

Publisher: IOP Publishing

E-ISSN: 1741-4199|24|3|37803-37806

ISSN: 1674-1056

Source: Chinese Physics B, Vol.24, Iss.3, 2015-03, pp. : 37803-37806

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Effects of helium implantation on silicon carbide (SiC) and graphite were studied to reveal the possibility of SiC replacing graphite as plasma facing materials. Pressureless sintered SiC and graphite SMF-800 were implanted with He+ ions of 20 keV and 100 keV at different temperatures and different fluences. The He+ irradiation induced microstructure changes were studied by field-emission scanning electron microscopy (FESEM), atomic force microscopy (AFM), and transmission electron microscopy (TEM).