Author: Zhang Yazhou Ding Guifu Wang Hong Cheng Ping Liu Rui
Publisher: IOP Publishing
E-ISSN: 1361-6439|25|4|45009-45019
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.4, 2015-04, pp. : 45009-45019
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Abstract
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