Author： Larramendy Florian Mazenq Laurent Laborde Adrian Temple-Boyer Pierre Paul Oliver Larramendy Florian
Publisher： IOP Publishing
E-ISSN： 1361-6439|25|4|45010-45018
ISSN： 0960-1317
Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.4, 2015-04, pp. : 45010-45018
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
By Srivastava Sanjay K Kumar Dinesh Schmitt S W Sood K N Christiansen S H Singh P K
Nanotechnology, Vol. 25, Iss. 17, 2014-05 ,pp. :
Access to resources
Recommend
SU-8 Photolithography as a Toolbox for Carbon MEMS
Micromachines, Vol. 5, Iss. 3, 2014-09 ,pp. :
Access to resources