Ion beam irradiation of nanostructures: sputtering, dopant incorporation, and dynamic annealing

Publisher： IOP Publishing

E-ISSN： 1361-6641|30|3|33001-33013

ISSN： 0268-1242

Source： Semiconductor Science and Technology, Vol.30, Iss.3, 2015-03, pp. : 33001-33013

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