Transfer of self-aligned spacer patterns for single-digit nanofabrication

Author: Doerk Gregory S   Gao He   Wan Lei   Lille Jeff   Patel K C   Chapuis Yves-Andre   Ruiz Ricardo   Albrecht Thomas R  

Publisher: IOP Publishing

E-ISSN: 1361-6528|26|8|85304-85312

ISSN: 0957-4484

Source: Nanotechnology, Vol.26, Iss.8, 2015-02, pp. : 85304-85312

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Abstract