TiO2 thin and thick films grown on Si/glass by sputtering of titanium targets in an RF inductively coupled plasma

Publisher： IOP Publishing

E-ISSN： 1742-6596|591|1|337-341

ISSN： 1742-6596

Source： Journal of Physics: Conference Series , Vol.591, Iss.1, 2015-03, pp. : 337-341

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