Sensitivity Deviation Probability Model of Close Loop Micro- Accelerometer Based on Comb Finger Gaps' MEMS Process Error

Publisher： Bentham Science Publishers

E-ISSN： 1876-4037|2|1|43-48

ISSN： 1876-4029

Source： Micro and Nanosystems, Vol.2, Iss.1, 2010-03, pp. : 43-48

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