Author: Chen Shun-Tong Chen Chi-Hung
Publisher: IOP Publishing
E-ISSN: 1361-6439|25|7|75027-75038
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.7, 2015-07, pp. : 75027-75038
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Abstract
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