Reliable aluminum contact formation by electrostatic bonding

Author: Kárpáti T   Pap A E   Radnóczi Gy   Beke B   Bársony I   Fürjes P  

Publisher: IOP Publishing

E-ISSN: 1361-6439|25|7|75009-75016

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.7, 2015-07, pp. : 75009-75016

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