Impact of sputter deposition parameters on molybdenum nitride thin film properties

Author： Stöber L   Konrath J P   Krivec S   Patocka F   Schwarz S   Bittner A   Schneider M   Schmid U  

Publisher： IOP Publishing

E-ISSN： 1361-6439|25|7|74001-74011

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.7, 2015-07, pp. : 74001-74011

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