Linear micromechanical stepping drive for pinhole array positioning

Author: Endrödy Csaba   Mehner Hannes   Grewe Adrian   Hoffmann Martin  

Publisher: IOP Publishing

E-ISSN: 1361-6439|25|5|55009-55017

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.5, 2015-05, pp. : 55009-55017

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Abstract