Author： Endrödy Csaba Mehner Hannes Grewe Adrian Sinzinger Stefan Hoffmann Martin
Publisher： IOP Publishing
E-ISSN： 1361-6439|25|7|74002-74010
ISSN： 0960-1317
Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.7, 2015-07, pp. : 74002-74010
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