Multicomponent surface materials: subsequent surface structuring and deposition

Author： Huovinen Eero   Suvanto Mika   Pakkanen Tapani A  

Publisher： IOP Publishing

E-ISSN： 1361-6439|25|5|55005-55013

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.5, 2015-05, pp. : 55005-55013

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