Plasmonic lithography for fabricating nanoimprint masters with multi-scale patterns

Author： Jung Howon   Kim Seok   Han Dandan   Jang Jinhee   Oh Seonghyeon   Choi Jun-Hyuk   Lee Eung-Sug   Hahn Jae W  

Publisher： IOP Publishing

E-ISSN： 1361-6439|25|5|55004-55010

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.5, 2015-05, pp. : 55004-55010

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