An equation-based nonlinear model for non-flat MEMS fixed–fixed beams with non-vertical anchoring supports

Author： Zeng Juan   Garg Anurag   Kovacs Andrew   Bajaj Anil K   Peroulis Dimitrios  

Publisher： IOP Publishing

E-ISSN： 1361-6439|25|5|55018-55031

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.5, 2015-05, pp. : 55018-55031

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