Two dimensional PMMA nanofluidic device fabricated by hot embossing and oxygen plasma assisted thermal bonding methods

Author: Yin Zhifu   Sun Lei   Zou Helin   Cheng E  

Publisher: IOP Publishing

E-ISSN: 1361-6528|26|21|215302-215313

ISSN: 0957-4484

Source: Nanotechnology, Vol.26, Iss.21, 2015-05, pp. : 215302-215313

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Abstract