Fabrication challenges for indium phosphide microsystems

Author: Siwak N P   Fan X Z   Ghodssi R  

Publisher: IOP Publishing

E-ISSN: 1361-6439|25|4|43001-43014

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.4, 2015-04, pp. : 43001-43014

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Abstract