Author: Siwak N P Fan X Z Ghodssi R
Publisher: IOP Publishing
E-ISSN: 1361-6439|25|4|43001-43014
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.4, 2015-04, pp. : 43001-43014
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Abstract
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