A fabrication process for the monolithic integration of magnetoelastic actuators and silicon sensors

Author： Tang Jun   Green Scott R   Gianchandani Yogesh B  

Publisher： IOP Publishing

E-ISSN： 1361-6439|25|4|45001-45009

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.4, 2015-04, pp. : 45001-45009

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