Nano-LED array fabrication suitable for future single photon lithography

Author: Mikulics M   Hardtdegen H  

Publisher: IOP Publishing

E-ISSN: 1361-6528|26|18|185302-185308

ISSN: 0957-4484

Source: Nanotechnology, Vol.26, Iss.18, 2015-05, pp. : 185302-185308

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