Control of the initial growth in atomic layer deposition of Pt films by surface pretreatment

Author: Baek Seung-Hyub   Kang Chong-Yun   Kim Jin-Sang   Baek Seung-Hyub   Baek Seung-Hyub   Baek Seung-Hyub   Baek Seung-Hyub  

Publisher: IOP Publishing

E-ISSN: 1361-6528|26|30|304003-304011

ISSN: 0957-4484

Source: Nanotechnology, Vol.26, Iss.30, 2015-07, pp. : 304003-304011

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