The role of pulse length in target poisoning during reactive HiPIMS: application to amorphous HfO2

Author： Ganesan R   Murdoch B J   Treverrow B   Ross A E   Falconer I S   Kondyurin A   McCulloch D G   Partridge J G   McKenzie D R   Bilek M M M  

Publisher： IOP Publishing

E-ISSN： 1361-6595|24|3|35015-35023

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.24, Iss.3, 2015-06, pp. : 35015-35023

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