On the role of metastables in capacitively coupled oxygen discharges

Author： Gudmundsson J T   Lieberman M A  

Publisher： IOP Publishing

E-ISSN： 1361-6595|24|3|35016-35026

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.24, Iss.3, 2015-06, pp. : 35016-35026

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Abstract

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