Author： Gudmundsson J T Lieberman M A
Publisher： IOP Publishing
E-ISSN： 1361-6595|24|3|35016-35026
ISSN： 0963-0252
Source： Plasma Sources Science and Technology, Vol.24, Iss.3, 2015-06, pp. : 35016-35026
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Abstract
The roles of the metastable atoms O(&$^{1}$ ;D) and molecules O&$_{2}$ ;(a&$^{1}{{Delta}_{g}}$ ;) in a capacitively coupled rf driven oxygen discharge at 50 mTorr are explored using the one-dimensional object-oriented PIC/MCC code oopd1, which has one spatial dimension and three velocity components. The oxygen discharge model considers the species O&$_{2}({{text{X}}^{3}}{{Sigma}_{g}^{-}})$ ;, O&$_{2}({{text{a}}^{1}}{{Delta}_{g}})$ ;, O(&$^{3}$ ;P), O(&$^{1}$ ;D), O&$_2^{+}$ ;, O&$^{+}$ ;, O&$^{-}$ ;, and electrons. The particle density profiles, the electron heating rate profile, the electron energy probability function and the ion energy distribution function at the grounded electrode are explored, including and/or excluding the metastables and secondary electron emission. We find that detachment by the metastable molecule O&$_{2}$ ;(a&$^{1}{{Delta}_{g}}$ ;) has a significant influence on the discharge properties such as the electronegativity, the effective electron temperature and the electron heating processes.
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