Sustaining mechanism and spatial structure of high-density ring-shaped hollow cuspate magnetized rf plasma for low-pressure plasma processing

Author： Ohtsu Y Yanagise T

Publisher： IOP Publishing

E-ISSN： 1361-6595|24|3|34005-34013

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.24, Iss.3, 2015-06, pp. : 34005-34013

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