AlN films deposited by dc magnetron sputtering and high power impulse magnetron sputtering for SAW applications

Author: Aissa K Ait   Achour A   Elmazria O   Simon Q   Elhosni M   Boulet P   Robert S   Djouadi M A  

Publisher: IOP Publishing

E-ISSN: 1361-6463|48|14|145307-145312

ISSN: 0022-3727

Source: Journal of Physics D: Applied Physics, Vol.48, Iss.14, 2015-04, pp. : 145307-145312

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract