About stress in filled DRIE-trenches

Publisher: IOP Publishing

E-ISSN: 1361-6439|25|8|85003-85009

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.8, 2015-01, pp. : 85003-85009

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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Abstract