High Q diamond hemispherical resonators: fabrication and energy loss mechanisms

Publisher: IOP Publishing

E-ISSN: 1361-6439|25|8|85006-85017

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.8, 2015-01, pp. : 85006-85017

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