Resist Materials for Extreme Ultraviolet Lithography: Toward Low‐Cost Single‐Digit‐Nanometer Patterning

Publisher： John Wiley & Sons Inc

E-ISSN： 1521-4095|935-9648|38|5813-5819

ISSN： 0935-9648

Source： ADVANCED MATERIALS, Vol.935-9648, Iss.38, 2015-10, pp. : 5813-5819

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