Electrical assessment of diamond MIM capacitors and modeling of MEMS capacitive switch discharging

Author： Michalas L Koutsoureli M Saada S Mer–Calfati C Leuliet A Martins P Bansropun S Papaioannou G Bergonzo P Ziaei A

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.24, Iss.11, 2014-11, pp. : 115017-115024

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